According to DIN EN ISO 14644-3, the ability of the ventilation system of a cleanroom to maintain the air temperature and air humidity (given as relative humidity) within the limit values necessary for the application must be tested. The ambient temperature and air humidity influence processes such as the expansion or hardening of materials, the growth of micro-organisms as well as disintegration, corrosion and rust formation, and can thus damage the product manufactured in the cleanroom. For this reason, a precise measurement of temperature and relative air humidity in the cleanroom is of great significance. Additionally, the light intensity, sound level and comfort should also be measured everywhere in the room.
Guaranteeing regulation-compliant air temperature and air humidity with highly accurate probes
Additionally: Easy and reliable measurement of light intensity and sound level in the cleanroom
Climate measurements in the clean room
Valuable information on measurements of air temperature, relative humidity and differential pressure as well as flow testing in clean rooms
The most important standards
Useful tips on measurements
Measuring Instrument Requirements
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Cleanroom
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